The NPS is a white light confocal point sensor combined with an high precision motorized stage. It enables submicron altitude measurement on any type of surface without any contact on the sample.
Hirox created a completely new inclination stand featuring multiple integrated sensors with high precision 80 mm motorized Z axis. Multiple XY stages options: from 50x50mm up to 1000x1000mm for automatic XYZ acquisition, including extra large 3D stitchin
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